Equipment
Characterization equipment
- Probe station
- HP 4145B - Semiconductor parameter analyzer
- UV-Vis Spectrophotometer (200 nm-1100 nm)
- IR laser source (1330 nm, 1550 nm)
- UV light source (325 nm)
- PH/Temp meter
- PC with LabVIEW interface
Laboratory room and other tools
- 28 ΠΌ2
- Rapid thermal annealing system
- Mask aligner
- E-1030 Ion sputter
- Hot plate and stirring
- Oil bath
- Ultrasonic cleaner
- Spin Coater ACE-200